• No : 3848
  • Date of Issue : 2020/12/02 16:43
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Error Code:[0x5002] WARNING DEGAS PRESSURE

Error Message: Pump: Degassing unit vacuum flow line exhibits poor airtightness. Check the vacuum pressure of the degassing unit.
Category : 

Answer

«Main Cause»
A seal problem occurred in the degassing unit vacuum flow channels.　
 
«Countermeasure»
Check the vacuum pressure in the degassing unit. If the vacuum pressure status is [NG], switch the instrument power OFF and then switch it ON again. If the vacuum pressure status is [OK], the degassing unit was automatically restored and there is no problem.