If you find an abnormal condition such as smoke or you smell something burning, take the following measures:
• DUH Series
1. Turn OFF the power switch of the control unit
2. Disconnect the power cable from the rear of the control unit.
• Electric X-Y stage
1. Turn ON the emergency stop SW.
2. Turn OFF the power switch of the control unit.
3. Disconnect the power cable from the rear of the control unit.