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SCD furnace abs. press warning[Error Code:9077]
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No : 5955
Date of Issue : 2021/05/18 15:37
Last Updated : 2021/06/03 15:50
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SCD furnace abs. press warning[Error Code:9077]
The absolute pressure of the SCD furnace increases and exceeds the threshold due to degradation of the inner pyrotube.
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Error/Warning
Answer
Replace the inner pyrotube.
※Replace the inner pyrotube
MaintenanceHelp_SCD-Inner-Pyrotube-Replacement.pdf
※Reset the counter
[HOME] - [Detector] - [Submenu] - [SCD Parts Counter] to display [SCD Parts Counter] screen.
Screen_SCD-Parts-Counter.pdf