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  • No : 6784
  • Date of Issue : 2021/08/19 09:39
  • Last Updated : 2022/01/18 09:51
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(ICPS) Low stability of spectrum intensity

(ICPS) Low stability of spectrum intensity
Category : 


• The ICPS installation location does not meet requirements related to installation location or facilities.
• One of the causes listed for problem "Spectrum intensity much lowers".
Clich here for "Spectrum intensity much lowers".
• A large amount of exhaust is discharged from the exhaust duct.

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