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  • No : 6783
  • Date of Issue : 2021/08/19 09:40
  • Last Updated : 2022/01/17 15:38
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(ICPS) Condensation is found on the RF coil

(ICPS) Condensation is found on the RF coil
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• Wipe off the water droplets with gauze or some other appropriate material and ignite the plasma.
• Checks that the installation location meets the installation environment.

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