FAQ - Frequently Asked Questions

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  • No : 5950
  • Date of Issue : 2021/05/18 15:37
  • Last Updated : 2021/06/09 16:51
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SCD ozone scrub. use time warn. [Error Code:9072]

The count exceeded the set threshold value.
Category : 

Answer

The risk of ozone entering the exhaust from the vacuum pump increases.
Replace the filling materials of the ozone scrubber and then reset the counter.


Ozone Scrubber Replacement
 
Press [HOME] > [Detector] > [Submenu] > [SCD Parts Counter],
and then display [SCD Parts Counter] screen and reset the counter. 

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