• No : 6738
  • Date of Issue : 2021/07/30 10:11
  • Last Updated : 2021/10/04 10:07
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(ICPE) Condensation occurs on the RF coil or the cooling jacket

(ICPE) Condensation occurs on the RF coil or the cooling jacket.
Category : 

Answer

• Wipe off the water droplets with gauze or some other appropriate material and ignite the plasma.
• Checks that the installation location meets the installation environment.