The operation of the safety devices used with the ICPE-9800 can be checked as described below. Check the operation of the safety devices on a regular basis (every one month).
1. Argon gas pressure sensor:
1)Ignite the plasma.
2)Stop the supply of argon gas and check that the plasma is extinguished.
2. Plasma stand door switch:
1) Ignite the plasma.
2) Open the plasma stand door and check that the plasma is extinguished.
3. Cooling water flow switch for RF coil, RF power supply, and orifice assembly:
1) Ignite the plasma.
2) Stop the supply of cooling water and check that the plasma is extinguished