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(ICPE) Checking Operation of Safety Devices
(ICPE) Checking Operation of Safety Devices
Answer
The operation of the safety devices used with the ICPE-9800 can be checked as described below. Check the operation of the safety devices on a regular basis (every one month).
1. Argon gas pressure sensor:
1)Ignite the plasma.
2)Stop the supply of argon gas and check that the plasma is extinguished.
1)Ignite the plasma.
2)Stop the supply of argon gas and check that the plasma is extinguished.
2. Plasma stand door switch:
1) Ignite the plasma.
2) Open the plasma stand door and check that the plasma is extinguished.
1) Ignite the plasma.
2) Open the plasma stand door and check that the plasma is extinguished.
3. Cooling water flow switch for RF coil, RF power supply, and orifice assembly:
1) Ignite the plasma.
2) Stop the supply of cooling water and check that the plasma is extinguished
1) Ignite the plasma.
2) Stop the supply of cooling water and check that the plasma is extinguished
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